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Adhesion Analysis of a Piezoelectric Viscoelastic Microbeam
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    Abstract:

    Adhesion properties of piezoelectric viscoelastic microbeam were researched. A parameter named peel number was introduced to show the adhesion properties of the piezoelectric viscoelastic microbeam, the effects of piezoelectric voltage, viscoelastic parameters, and geometric parameters on peel number of the piezoelectric viscoelastic microbeam under adhesion were analyzed. The results show that, if piezoelectric voltage rises, the peel number will increase efficiently, which presents theoretical basis for repairing the adhering piezoelectric microbeam. The geometric parameters of the microbeam also show significant influence on the peel number, which will make a certain restriction on the design of MEMS and NEMS.

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