Quadrature VCO is one of the key components in high speed data link. High Q on-chip inductance and capacitance integration is a key fact, which highly affects the performance of Voltage Controlled Oscillator. In order to fully compact the traditional digital CMOS process, we have designed on-chip inductance and capacitance with ultra-deep submicron digital CMOS process, based on which a capacitive coupling quadrature VCO is implemented. According to the simulation, the center frequency of QVCO is 16.12GHz, with 10% frequency tuning range, -112dBc@ 1MHz phase noise and 0.39°phase error.